Project Information

Bid Title

6828 RFP Semiconductor Lab Modular Vacuum System

Issuing Agency

Washtenaw Community College

Location

Michigan

Published Date

Mar 17, 2026

Closing Date

Mar 24, 2026

Government Level

State & Local

Status

Closed

Original Source

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Bid Documents

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Project Description

6828 RFP Semiconductor Lab Modular Vacuum System

6828 RFP - Instructions & Specifications 274.11 KB 03/17/2026

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WASHTENAW COMMUNITY COLLEGE

Purchasing Department – Room SC326

RFP # 6828 Semiconductor Lab Modular Vacuum System

RFP Due Date: March 24th, 2026, at 2:00pm EDT.

4800 E. Huron River Drive

Ann Arbor, MI 48105-4800

pur@wccnet.edu

WASHTENAW COMMUNITY COLLEGE

Request for Proposal # 6828

Semiconductor Lab Modular Vacuum System

RFP Release Date: Tuesday, March 17th, 2026.

Proposal Responses Due Date: Tuesday, March 24th, 2026, by 2:00pm EDT.

Submit proposals electronically via email to:

Steven Hoekstra

Washtenaw Community College

pur@wccnet.edu

WASHTENAW COMMUNITY COLLEGE

Purchasing Department – Room SC326

RFP # 6828 Semiconductor Lab Modular Vacuum System

RFP Due Date: March 24th, 2026, at 2:00pm EDT.

4800 E. Huron River Drive

Ann Arbor, MI 48105-4800

pur@wccnet.edu

1.0 Proposal Invitation

Washtenaw Community College (“College” and/or “WCC”) seeks proposals from vendors that can fulfill

the deliverables as outlined in this RFP. The major goal of this project is to supply a new, cohesive and

cost-effective vacuum system for use in the College’s Advanced Manufacturing programs, suitable for use

in a cleanroom setting where students will be studying the manufacture of semiconductors and other

technical components.

The purpose of this RFP is to assess the current availability of the selections outlined herein. The College,

at its sole discretion, may consider the closest comparable substitution for award. The selected supplier

will be able to provide all deliverables outlined in the RFP.

Response to this RFP confirms an understanding that this is not a contract or offer of business by the

College. This request for proposal in no manner obligates the College to the eventual purchase of any

products or services described, implied, or which may be proposed, until confirmed by written agreement,

and may be terminated by the College without penalty or obligation at any time prior to the signing of an

agreement, contract, or purchase order. In submitting a proposal, Supplier agrees that all materials

associated with, attached to, or referenced by the submitted proposal will become the property of the

College and may be incorporated into a subsequent contractual agreement between the successful

Supplier and the College.

The College is not liable in any manner or to any extent for any cost or expense incurred by the Supplier

in the preparation, submission, presentation, or any other action connected with proposing or otherwise

responding to this RFP. Such exemption from liability applies whether such costs are incurred directly by

the Supplier or indirectly through the Supplier’s agents, employees, assigns, or others, whether related or

not to the Supplier.

The College reserves the right to reject any and all proposals and waive any irregularities. Proposals which

fail to comply fully with any provisions of this document may be considered invalid and may not receive

consideration. The College also reserves the right to negotiate terms and conditions of a contract with the

chosen Supplier. The College reserves the right to award a contract based on any combination of the

specifications described herein.

The awarded Supplier’s proposal response shall be subject to, and governed by the College’s Terms and

Conditions for Product Purchase and Installation, located at

https://www.wccnet.edu/about/purchasing/purchasing-terms-products.php, as a condition of award,

and are hereby incorporated herein as a substantive part of the solicitation documents. In the event

there is any conflict or inconsistency between the Terms & Conditions referenced in the RFP documents

and those included in a Supplier’s Proposal response, Supplier’s quote, or listed on the Supplier’s

website, the Terms & Conditions of the RFP documents shall govern. Proposal submissions must include

all exceptions to the College’s terms and conditions of purchase. A purchase order signed by an

authorized agent of the College is required to constitute acceptance of Proposal offer and offer terms

and conditions of service. This RFP and any subsequently offered contracts will be governed by the laws

of the State of Michigan. Any and all applicable valid executive orders, Federal, State or local laws,

WASHTENAW COMMUNITY COLLEGE

Purchasing Department – Room SC326

RFP # 6828 Semiconductor Lab Modular Vacuum System

RFP Due Date: March 24th, 2026, at 2:00pm EDT.

4800 E. Huron River Drive

Ann Arbor, MI 48105-4800

pur@wccnet.edu

ordinances or rules or regulations shall apply to any contract if and when offered and are deemed

incorporated herein.

As a public institution, the College is subject to the terms and conditions of the Freedom of Information

Act. As required by law, any information submitted in response to this request for proposal could become

public information. Suppliers responding to this proposal are cautioned not to include any proprietary

information as part of their proposal unless such proprietary information is carefully identified in writing

as such and accepted by the College as proprietary. Any documents submitted may be reviewed and

evaluated by any person at the discretion of the College, including non-allied and independent Suppliers

retained by the College now or in the future.

Timing is critical. The College is looking to take possession of all components of this purchase on or

before June 15th, 2026, with a preference for suppliers that can deliver the first vacuum chamber prior

to May 4th, 2026.

Preference will be given to the suppliers who can meet the specifications provided or closest substitutes

as determined by the College. Award of a contract will be based on the proposal whose offering best

meets the needs of the College. Criteria for award of a contract include, but are not limited to features &

options, technical functionality, adherence to minimum requirements and preferred specifications,

compatibility with College’s existing room and building infrastructure, ability for the modular vacuum

system to be installed and commission by WCC-personnel, ability to provide required equipment, pricing,

and deliverable timeline. The College reserves the right to request follow-up information such as

questions, presentations, and demos prior to contract award.

2.0 Planned RFP Schedule

RFP Timeline:

RFP Issued: Tuesday, March 17th, 2026.

Submission of Written Questions from Prospective Bidders: Thursday, March 19th, 2026, by 2:00pm

EDT.

College will post Responses to Written Questions: Friday, March 20th, 2026, by 2:00pm.

RFP Due Date: Tuesday, March 24th, 2026, by 2:00pm.

WASHTENAW COMMUNITY COLLEGE

Purchasing Department – Room SC326

RFP # 6828 Semiconductor Lab Modular Vacuum System

RFP Due Date: March 24th, 2026, at 2:00pm EDT.

4800 E. Huron River Drive

Ann Arbor, MI 48105-4800

pur@wccnet.edu

Minimum Requirements:

Vacuum chamber – cube or rectangle shape. 6” minimum to 12” maximum internal dimensions. A total

quantity of six (6) vacuum chambers are required.

Total weight per chamber shall not exceed 40 lbs. when empty.

Three (3) or more vacuum ports in total.

KF16 or KF25 fittings for vacuum hose connection.

At least two (2) manual valves per chamber, one (1) to isolate the pump and one (1) to purge or backfill the

chamber.

Mechanical gauge for each chamber.

Secondary Vacuum gauge for each chamber with analog and/or RS232/485 output.

Oil-free vacuum pump. 60 Torr or lower absolute vacuum capability. 115 VAC, 1/2 HP maximum power. A

total quantity of six (6) vacuum pumps are required.

Each individual pump shall produce no more than 60db of sound pressure levels while in operation, allowing a

reasonable noise level to facilitate spoken communications, lectures, and lessons within the cleanroom

setting.

Total weight per pump shall not exceed 40 lbs.

All components can be installed and commissioned without the use of specialized equipment.

Final delivery of all components and units MUST be completed on or before June 15th, 2026.

Preferred Specifications:

Fully assembled and tested as a complete system prior to delivery.

8” minimum to 12” maximum internal dimensions.

Aluminum or stainless-steel chamber for durability.

Hinged door on vacuum chamber.

KF16 or KF25 fittings for secondary gauge connection.

Constructed using durable materials suitable for at least 10 years of regular use in WCC’s Semiconductor

Laboratory.

Chambers can withstand between 2 and 15 lbs. of positive pressure for leak testing.

A pressure relief valve for safety purposes, rated less than or equal to the chamber maximum positive

pressure rating.

Less than 10 Torr absolute vacuum capability.

Scroll or diaphragm vacuum pumps.

Stainless steel bellows vacuum hose.

Pump with automatic vacuum inlet valve for power failures.

At least one vacuum system can be delivered by May 4th, 2026.

Shipping point:

Delivery:

FOB WCC, Pre-paid

The complete system must be delivered & received in full no later than June 15th,

2026, with a preference for proposals which can fulfill a May 4th delivery date.

Final acceptance shall be contingent upon successful, functional testing,

demonstrating that the system meets all required specifications listed above.

WASHTENAW COMMUNITY COLLEGE

Purchasing Department – Room SC326

RFP # 6828 Semiconductor Lab Modular Vacuum System

RFP Due Date: March 24th, 2026, at 2:00pm EDT.

4800 E. Huron River Drive

Ann Arbor, MI 48105-4800

pur@wccnet.edu

3.0 Specifications/Requirements

1. The modular vacuum system shall be new, unused, and of current production, with no refurbished,

reconditioned, or discontinued components.

2. Vendor shall specify the manufacturer, model name, and complete system configuration, including all

included components to meet all requirements of this RFP.

3. The proposal shall include all items required for full operational use, including but not limited to:

• 6 individual vacuum chambers to be shared between instructor and multiple students.

• Hardware & Software

• Vacuum chambers and vacuum pumps

• Connectors, gauges, dials, adapters, fittings, flanges, plates, and all related components.

• Training and installation resources

4. Please indicate the date when the unit and all components will be available for final delivery to WCC’s

Campus in Ann Arbor, Michigan.

5. At its sole discretion, the College reserves the right to make an award based on any individual

specification or a combination of the desired specifications outlined below.

Specifications:

4.0 RFP Requirements - General

The following requirements must be met when responding to this RFP. Dealer quote will be sufficient

provided:

• License fees, maintenance fees, delivery & destination fees, additional professional service fees,

consultation fees, all hardware, software, and training costs required to meet the primary

objectives as stated in this RFP have been included.

• A copy of the signed Signature Page is included

*Washtenaw Community College holds a tax-exempt status and shall not be charged any Federal or

State taxes where allowed. Tax-exempt documentation shall be presented when required.

5.0 Submission Directions

A. Proposals following the guidelines outlined in this document are due on or before Tuesday,

March 24th, 2026, 2:00pm EDT.

Submit proposals electronically via email to:

Steven Hoekstra

Washtenaw Community College

pur@wccnet.edu

RFP # 6828 Semiconductor Lab Modular Vacuum System

Commodity Codes

• NAICS 334413Semiconductor and Related Device Manufacturing

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